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题名 | A thick TiN/TiCN multilayer film by DC magnetron sputtering |
| 作者: | Zheng JY(郑建云)1,2 ; Hao JY(郝俊英)1; Liu XQ(刘小强)1,2; Gong QY(龚秋雨)1,2; Liu WM(刘维民)1 |
| 所属部门: | 固体润滑国家重点实验室 |
| 所属课题: | 空间润滑材料组 |
| 通讯作者: | 郝俊英 |
| 学科分类: | 材料科学与物理化学 |
| 关键词: | TiN/TiCN multilayer ; Thick film ; Microstructure and properties ; Friction and wear |
| 刊名: | Surface & Coatings Technology |
| DOI: | 10.1016/j.surfcoat.2012.08.045 |
| ISSN号: | 0257-8972 |
| 发表日期: | 2012 |
| 卷: | 209, 110-116 |
| 收录类别: | SCI |
| 英文摘要: | A thick TiN/TiCN multilayer film was prepared on steel and silicon (Si) substrates using a DC magnetron sputtering technique under a high deposition rate. Its thickness reached about 23.5 μm and it was composed of 30 bilayer numbers. X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), cross-sectional high resolution transmission electron microscopy (HRTEM) and field emitted scanning electron microscopy (FESEM) were employed to characterize the composition and structure of the film on the Si substrates. It was found that the inner TiCN layers consisted of a mixture nanocrystalline TiCN phase and amorphous carbon, and the TiN layers showed nano-columnar structure. The adhesion force and the hardness of the film deposited on steel substrates were 29.0 N and 21.4 GPa, respectively. It was revealed that the thick film still maintained the excellent mechanical properties. The film sliding against steel ball had good wear resistance and very long service life (> 11 h) in ambient air under high rotate speed and large load. |
| 资助者: | the National Nature Science Foundation of China (50905177) |
| 语种: | 英语 |
| 影响因子: | 1.941 |
| 兰州化物所论文排名: | 第一作者单位 |
| WOS记录号: | WOS:000310656200016 |
| 引用统计: | 被引频次[WOS]:16, [查看WOS记录] [查看WOS中相关记录] |
| 内容类型: | 期刊论文 |
| URI标识: | http://ir.licp.ac.cn/handle/362003/3471 |
| 专题: | 固体润滑国家重点实验室_期刊论文 |
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