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Effects of Al incorporation on the mechanical and tribologic

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题名:	Effects of Al incorporation on the mechanical and tribological properties of Ti-doped a-C:H ﬁlms deposited by magnetron sputtering
作者:	Pang XJ(逄显娟) ; Shi L(石雷) ; Wang P(王鹏) ; Xia YQ(夏延秋); Liu WM(刘维民)
所属部门:	固体润滑国家重点实验室
所属课题:	空间润滑材料组
通讯作者:	刘维民
学科分类:	材料科学与物理化学
关键词:	Magnetron sputtering ; TiAl-doped a-C:H ﬁlms ; Ti-doped a-C:H ﬁlms ; Microstructure ; Tribological properties
刊名:	Current Applied Physics (影响因子：2.058[JCR-2017],2.116[5-Year])
ISSN号:	1567-1739
发表日期:	2011
卷:	11, 页:771-775
收录类别:	SCI
资助者:	the Natural Science Foundation of China (Grant NO.50421502);973 Program of China (Grant NO.2007CB607601)
摘要:	Ti-and TiAl-doped a-C:H ﬁlms were deposited on silicon substrates by magnetron sputtering Ti and TiAl target in argon and methane gas mixture atmosphere. To better elucidate the structural evolution after Al adding, X-ray diffraction, Raman spectroscopy, and X-ray photoelectron spectroscopy were used to comparatively analyze the structural transformation in the as-deposited ﬁlms. Compared with Ti-doped a-C:H ﬁlms, the introduction of Al enhanced carbon ﬁlms graphitization effectively lowered the residual stress from 1.35 GPa to 0.65 GPa. Furthermore, though the hardness of TiAl-doped a-C:H ﬁlms was moderately lowered, TiAl-doped a-C:H ﬁlms exhibited higher toughness, lower friction coefﬁcient and lower wear rate. The better tribological performances of TiAl-doped a-C:H ﬁlms may originate from the formation of graphitized transfer layer during the friction test.
语种:	英语
内容类型:	期刊论文
URI标识:	http://ir.licp.ac.cn/handle/362003/705
专题:	固体润滑国家重点实验室_期刊论文